Allen Bradley罗克韦尔AB 1747/1756/1784/1785/2094/2098/1394C/1336F/1745系列、瑞恩模Reliance系列
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1. DCS-FOXBORO(福克斯波罗):I/A Series系统:FBM(现场输入/输出模块
TRICONEX:冗余容错控制系统.
2. PLC:Allen-Bradley:1756/ 1771/ 1785系列、Reliance瑞恩。
3. 伺服控制系统:
Varian E1000 Implanter parts system 200mm
AMAT Quantum Leap II Process Control Rack
Applied Materials QUANTUM LEAP II PROCESS MODULE
Applied Materials QUANTUM LEAP II Beam Line
LAM 9600 Metal Etch System 6" Wafers Working
Kokusai Vertron 3 VDF LPCVD Diffusion furnace 200mm
KLA 2131 Defect Wafer Inspection System Working
Novellus Concept Two II Altus Deposition Tool DLCM
AMAT XR80 300mm Ion Implanter Process Rack 9090-00668
LAM Research AC Distribution Unit 685-029442-140 New
Hitachi S-9300 CD SEM Tool 300mm Complete
AMAT Centura RTP 300mm Chamber Tool
AMAT Centura RTP Chamber Tool 300mm
AMAT Applied Materials P5000 Mark II CVD Reactor 200mm
AMAT P5000 Nitride Deposition System 150mm Working
AMAT P5000 TEOS Deposition System 150mm Working
LAM OnTrak DSS-200 Wafer Scrubber System Working
LAM OnTrak DSS-200 Wafer Scrubber System Working
AMAT P5000 TEOS Deposition System 150mm Working
Lam OnTrak 200mm Scubber Tool DSS-200 DSS200
GaSonics Aura 2000-LL 200mm Wafer Asher A-2000LL tested
Varian E1000 Implanter End Station Module 200mm
Tokyo Electron ACT 12 Cassette Block 200mm
Lam Research 200mm Poly Plasma Etcher 4420
AMAT Centura 5200 Mod 1 RTP Chamber 0040-35703
Faro Measuring Arm S12 Silver Series 12 working
Tokyo Electron ACT 8 Cassette Block
Rorze FABS-202 Transfer Station 1VRR8150-W01-00?6
Rorze FABS-202 Wafer Transfer 1VRR8150-W01-00?6 working
Rorze FABS-202 Wafer Transfer 1VRR8150-W01-00?6 working
Nova NovaScan 3060 Meas. Unit Wet System new 0190-00492
Nova NovaScan 3030 Dry Meas. Unit 300mm new 0190-00563
Faro Measuring Arm S08 Silver Series working
NanoMetrics NanoSpec 9000 Profilometer Set new
KLA-Tencor AIT 200mm Wafer Inspection System 8020
Tokyo Electron ACT 8 Interface Block and WEE Station
NANOmetrics NanoSpec 9000b 9000i Metrology Tool new
Coherent ExciStar S Laser 1127985 rebuilt 0190-B0150
LAM Rittal Corp. AC Distribution Unit ES5984 New
Rudolph MetaPulse XCu 200mm Metrology Tool
KLA-Tencor CRS 3000 300MM COMPLETE SYSTEM
Tokyo Electron ACT 8 Process Block Robotics Arm
Tokyo Electron ACT 12 Process Block Robotic Arm 200mm
Verteq 1800 SRD Tool 1800.6 1800-6AR working 200mm
CTI-Cryogenics High Capacity Compressor 0190-07137 new
TEL ACT 12 Wafer Edge Exposure (WEE) Process Station
Tokyo Electron ACT 8 Wafer Edge Exposure(WEE) Prcss Stn
ABM-407B-1-S-CE?-S293 Robot Track 300DFF1P PRE-300BU
ESC-218BT-S293
Rudolph Technologies MetaPulse 200 Metrology Tool 200mm
Rudolph Technologies MetaPulse 200X Cu Metrology Tool
Rudolph Technologies Metrology Tool MetaPulse 200X Cu
Tokyo Electron ACT 12 Develop Process Station Right
Tokyo Electron ACT 12 Develop Process Station Left
Tokyo Electron ACT 8 Develop Process Station Left
Tokyo Electron ACT 8 Develop Process Station Right
Edwards STP-A1603P Vacuum Turbopump AMAT 3620-00470 new
Novellus Concept Two Altus Wafer Chamber CVD-W complete
Shimadzu Turbopump TMP-3403LMTC rebuilt 3620-00486
Therma-Wave Opti-Probe 2600B thermawave optiprobe
Varian E1000 Implanter End Station 200mm Wheel
AMAT XR80 Implanter 300mm Wheel and motor 0020-99685
Tokyo Electron TEL ACT 12 Chemical Cabinet Working
TEL ACT 8 SOG Coat Process Station Right Working
TEL ACT 8 SOG Coat Process Station Left Working
Tokyo Electron TEL ACT 8 Chemical Cabinet Working
Tokyo Electron ACT 12 Coat Process Station Left
Tokyo Electron ACT 12 Cassette Block Robotics Arm
Tokyo Electron ACT 12 Coat Process Station Right
Tokyo Electron ACT 8 Coat Process Station Left
Tokyo Electron ACT 8 Coat Process Station Right
Tokyo Electron ACT 8 Cassette Block Robotics Arm
Genus 7000 CVD Mainbody 200mm Brooks Robot VCE
Edwards Vacuum Turbopump STP-XH2603P new 3620-00368
Novellus Concept II Two C2-DCLM-S Untested (For Parts)
Novellus Concept II Two C2-DCLM-S Untested (For Parts)
SMC Thermo-Con ACT 12 Tokyo Electron INR-244-244U-67?0
Pfeiffer Vacuum Turbopump TMH 1001P rebuilt
Varian E1000 Implanter Gas Box Assy. E11029020
Kensington 200mm Wafer Sorter Mapping Station CSMT-4
Brooks MagnaTran 8 Dual Arm Robot 0190-28689 untested
Takatori ATRM-2100 Delaminator Tape Remover Working
KLA-Tencor Prometrix FT-750 Film Thickness Measurement
Therma-Wave OptiProbe 2600B Film Measurement Module
ATS M-PAK Tmp Control System Chiller MP40C-DI new
AMAT Part No: 0190-08467
Shimadzu Vacuum Turbopump TMP 2001-LME new
ASML DSX Stepper A1 Prime 8540138001 working
AMAT Endura PVD Lower Chamber 300mm 0010-22744
AMAT Endura PVD Lower Chamber 0010-22744 300mm
AMAT XR80 Implanter Wheel Assembly 200mm
SMC Thermo-Con TEL ACT 8 Temp Control CTINR-244-211T-?45
Varian E1000 Implanter Magnet Assy.
TEL ACT 8 or 12 Computer Module CT2980-415508-W?1
ATS M-Pak MP40C-DI Temp. Control Chiller 0190-08467 new
ATS M-Pak Chiller System MP40B-GL new 0190-08471
Nicolet ECO 1000 Metrology Tool untested
Axcelis Fusion 200 Photostabilizer 200 PCU untested
Axcelis Fusion 200 PCU Photostabilizer 200mm untested
TEL ACT 8 Computer Module CT2980-415508-1?2 working
AMAT P5000 Mark II Etch Chamber Assembly complete
Kobelco Leo LTA-1200 Wafer Lifetime Measuring System
Advanced Thermal Sciences Chiller MP40B-GL working
Shimadzu Vacuum Turbopump TMP-3203LMC-K1 working
Shimadzu Vacuum Turbopump TMP-3203LMEC-K1 working
Shimadzu Turbopump TMP-3403LMC working 3620-00454
Therma-Wave OptiProbe 2600B OP2600B Measurement Mod.
Coherent Photocoagulatio?n Laser Novus Omni untested
Shimadzu Vacuum Turbopump TMP-3403LMTC working
Shimadzu Vacuum Turbopump TMP-3403LMC working
Varian E1000 Cassette Handler Chamber E17046420
Brooks Inligner Prealigner & Controller 001-2980-69
SMC Thermo Chiller INR-497-049 working
Yaskawa Transfer Robot Track XU-ACL3701 new
Edwards iQDP80 Vacuum Pump QMB250 Blower Rebuilt
Leybold Turbovac 1000 C Vacuum Turbopump rebuilt
Therma-Wave OptiProbe 2600B Film Measurement Module
ASML AT1100 193NM Scanner AA Laser Module working
Toyota T600 Vacuum Dry Pump 0240-52730 new
Tokyo Electron TEL ACT 12 AC Power Box Working
Tokyo Electron TEL ACT 8 AC Power Box Working
TEL Varian EX Power Supply HPC-T003 E19002170 working
Hitachi S-9300 SEM Transfer Robot working
Tokyo Electron ACT 8 Driver Module
Toyota T600 Vacuum Dry Pump new 0240-52729
MRC Power Supply Tower PDP 2500 ACG-10B MDX Delta
TEL ACT 12 WEE Lamp House CT2985-411701-W?3 HU250T-A
TEL ACT 8 Interface Block Robotics Arm 200mm
TEL ACT 12 Interface Block Robotics Arm 200mm working